2/28/2011	12:39:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/28/2011	12:39:46 PM	Recipe started at 12:39 PM
2/28/2011	12:39:46 PM	Helium valve closed
2/28/2011	12:39:46 PM	H2 valve closed
2/28/2011	12:39:46 PM	BCl3 valve closed
2/28/2011	12:39:46 PM	PH3 valve closed
2/28/2011	12:39:46 PM	SiCl4 pre valve closed
2/28/2011	12:39:46 PM	SiCl4 post valve closed
2/28/2011	12:39:46 PM	Main Vac valve closed
2/28/2011	12:39:46 PM	Bypass valve closed
2/28/2011	12:39:46 PM	Bubbler valve closed
2/28/2011	12:39:46 PM	Helium MFC set to  0.000000
2/28/2011	12:39:46 PM	H2 MFC set to  0.000000
2/28/2011	12:39:46 PM	BCl3 MFC set to  0.000000
2/28/2011	12:39:46 PM	PHl3 MFC set to  0.000000
2/28/2011	12:39:46 PM	SiCl4 MFC set to  0.000000
2/28/2011	12:39:46 PM	Bypass solenoid MFC set to  0.000000
2/28/2011	12:39:47 PM	Tube furnace set to 0
2/28/2011	12:39:47 PM	Run finished at 12:39 PM
2/28/2011	12:39:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
2/28/2011	12:45:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2011	12:45:03 PM	Recipe started at 12:45 PM
2/28/2011	12:45:03 PM	Helium valve closed
2/28/2011	12:45:03 PM	H2 valve closed
2/28/2011	12:45:03 PM	BCl3 valve closed
2/28/2011	12:45:03 PM	PH3 valve closed
2/28/2011	12:45:03 PM	SiCl4 pre valve closed
2/28/2011	12:45:03 PM	SiCl4 post valve closed
2/28/2011	12:45:03 PM	Main Vac valve closed
2/28/2011	12:45:03 PM	Bubbler valve closed
2/28/2011	12:45:03 PM	Bypass valve opened
2/28/2011	12:45:03 PM	Helium MFC set to  0.000000
2/28/2011	12:45:03 PM	H2 MFC set to  0.000000
2/28/2011	12:45:03 PM	BCl3 MFC set to  0.000000
2/28/2011	12:45:03 PM	PHl3 MFC set to  0.000000
2/28/2011	12:45:03 PM	SiCl4 MFC set to  0.000000
2/28/2011	12:45:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2011	12:45:03 PM	Tube furnace set to 0
2/28/2011	12:45:03 PM	Helium valve closed
2/28/2011	12:45:03 PM	H2 valve closed
2/28/2011	12:45:03 PM	BCl3 valve closed
2/28/2011	12:45:03 PM	PH3 valve closed
2/28/2011	12:45:03 PM	SiCl4 pre valve closed
2/28/2011	12:45:03 PM	SiCl4 post valve closed
2/28/2011	12:45:03 PM	Bubbler valve closed
2/28/2011	12:45:03 PM	Main Vac valve opened
2/28/2011	12:45:03 PM	Bypass valve opened
2/28/2011	12:45:03 PM	Helium MFC set to  0.000000
2/28/2011	12:45:03 PM	H2 MFC set to  0.000000
2/28/2011	12:45:03 PM	BCl3 MFC set to  0.000000
2/28/2011	12:45:03 PM	PHl3 MFC set to  0.000000
2/28/2011	12:45:03 PM	SiCl4 MFC set to  0.000000
2/28/2011	12:45:03 PM	Bypass solenoid MFC set to  0.000000
2/28/2011	12:45:03 PM	Tube furnace set to 0
2/28/2011	12:45:04 PM	Run finished at 12:45 PM
2/28/2011	12:45:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/28/2011	1:50:07 PM	Helium MFC set to  100.000000
2/28/2011	1:50:08 PM	Helium valve opened
2/28/2011	1:50:25 PM	Helium valve closed
2/28/2011	4:34:09 PM	H2 MFC set to  10.000000
2/28/2011	4:34:10 PM	H2 valve opened
2/28/2011	4:34:11 PM	H2 valve closed
